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Investigation on the passivation at the GeOx/Ge interface trap with high oxidation state in GeOx formed by ozone oxidation
2023
期刊
Journal of Materials Science: Materials in Electronics
- 卷 34
- 期 28
- Springer Science and Business Media LLC
- ISSN: 0957-4522
- DOI: 10.1007/s10854-023-11334-5
