简历详情
论文
Convolutional Neural Network (CNN) Based Process Window Analysising for Lithography
期刊: 2024 Conference of Science and Technology for Integrated Circuits (CSTIC) 2024作者: Zeyang Chen,Jiahui Zuo,Tianhao Huang,Pan Liu,Yuanzheng Cui,Sheng Li,Guodong Zhou*
DOI:10.1109/cstic61820.2024.10531893
The Impact of Wafer Warpage-Induced Unevenness on Alignment
期刊: 2024 Conference of Science and Technology for Integrated Circuits (CSTIC) 2024作者: Pan Liu,Tianhao Huang,Zeyang Chen,Chenhang Ma,Jianming Wu,Dawei Gao*,Guodong Zhou*
DOI:10.1109/cstic61820.2024.10531999
Correlation Between CD/LWR and Focus Level Fitting Error: A Process Quality Indicator
期刊: 2024 Conference of Science and Technology for Integrated Circuits (CSTIC) 2024作者: Tianhao Huang,Pan Liu,Zeyang Chen,Sheng Li,Dawei Gao*,Guodong Zhou*
DOI:10.1109/cstic61820.2024.10532003
Reliability challenges in CMOS technology: A manufacturing process perspective
期刊: Microelectronic Engineering 2023作者: Qiao Teng,Yongkang Hu,Ran Cheng,Yongyu Wu,Guodong Zhou*,Dawei Gao*
DOI:10.1016/j.mee.2023.112086
