简历详情

Correlation Between CD/LWR and Focus Level Fitting Error: A Process Quality Indicator

期刊: 2024 Conference of Science and Technology for Integrated Circuits (CSTIC)  2024
作者: Tianhao Huang,Pan Liu,Zeyang Chen,Sheng Li,Dawei Gao*,Guodong Zhou*
DOI:10.1109/cstic61820.2024.10532003

一种优化晶圆中心光刻胶厚度的涂胶方法（实质审查）

作者: 黄天昊 · 周国栋 · 刘攀 · 陈泽阳 · 高大为